TY  - CONF
AU  - El, Darine
AU  - Seifert, Frank
AU  - Schlamminger, Stephan
AU  - Chao, Leon
AU  - Newell, David
AU  - Pratt, Jon
C2  - CPEM 2014 Digest, Rio de Janeiro, -1
DA  - 2014-08-24
LA  - en
PB  - CPEM 2014 Digest, Rio de Janeiro, -1
PY  - 2014
TI  - Heterodyne interferometer with subnanometer accuracy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915347
ER  -