TY  - JOUR
AU  - Sunday, Daniel
AU  - Delachat, Florian
AU  - Gharbi, Ahmed
AU  - Freychet, Guillaume
AU  - Liman, Christopher
AU  - Tiron, Raluca
AU  - Kline, Regis
C2  - Journal of Applied Crystallography
DA  - 2019-02-01
LA  - en
PB  - Journal of Applied Crystallography
PY  - 2019
TI  - X-ray Characterization of Contact Holes for Block Copolymer Lithography
ER  -