TY  - JOUR
AU  - Kalanyan, Berc
AU  - Beams, Ryan
AU  - Katz, Michael
AU  - Davydov, Albert
AU  - Maslar, James
AU  - Kanjolia, Ravindra
C2  - Journal of Vacuum Science & Technology A
DA  - 2018-12-31
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 2018
TI  - Atomic layer deposition of MoS2 films using bis(tert-butylimido)-bis(dimethylamido)molybdenum and 1-propanethiol
ER  -