TY - JOUR AU - Davydov, Albert AU - Debnath, Ratan AU - Wen, B. AU - Paramanik, Dipak AU - Motayed, Abhishek AU - King, M. C2 - Journal of Vacuum Science and Technology B DA - 2014-02-19 LA - en PB - Journal of Vacuum Science and Technology B PY - 2014 TI - Top-Down Fabrication of Large-Area GaN Micro and Nano Pillars ER -