TY  - JOUR
AU  - Lee, Chang
AU  - Moffat, Thomas
C2  - Electrochimica ACTA
DA  - 2010-07-23
LA  - en
PB  - Electrochimica ACTA
PY  - 2010
TI  - A Modified Damascene Electrodeposition Process for Bottom-up Filling of Recessed Surface Features
ER  -