TY  - GEN
AU  - Martinez, Joaquin
AU  - Obeng, Yaw
AU  - Buckley, Michele
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2009-07-13
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2009
TI  - Semiconductor Microelectronics and Nanoelectronics Programs
ER  -