TY  - JOUR
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Lopez, Ernesto
AU  - Imer, Bernd
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2020-03-28
DO  - https://doi.org/10.1117/1.JMM.19.1.014004
LA  - en
M1  - 19
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2020
TI  - Wear comparison of critical dimension-atomic force microscopy tips
ER  -