TY  - CONF
AU  - McGray, Craig
AU  - Stavis, Samuel
AU  - Geist, Jon
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-25
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy
ER  -