TY - CONF AU - Ryger, Ivan AU - Williams, Paul AU - Tomlin, Nathan AU - Artusio-Glimpse, Alexandra AU - Stephens, Michelle AU - Spidell, Matthew AU - Lehman, John C2 - Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 DA - 2017-07-02 LA - en PB - Proceeding of NEWRAD 2017, 13th International Conference on New Developments and Applications in Optical Radiometry, Tokyo, -1 PY - 2017 TI - Silicon Micromachined Capacitive Force Scale: The Way to Improved Radiation Pressure Sensing ER -