TY  - JOUR
AU  - Stan, Gheorghe
AU  - Mays, Ebony
AU  - Yoo, Hui-Jae
AU  - King, Sean
C2  - ACS Nano
DA  - 2016-10-02
LA  - en
PB  - ACS Nano
PY  - 2016
TI  - Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-k high-aspect ratio patterns
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920549
ER  -