TY  - JOUR
AU  - Maslar, James
AU  - Kimes, William
AU  - Sperling, Brent
AU  - Kanjolia, Ravindra
C2  - Journal of Vacuum Science & Technology A
DA  - 2019-06-27
DO  - https://doi.org/10.1116/1.5099264
LA  - en
M1  - 37
PB  - Journal of Vacuum Science & Technology A
PY  - 2019
TI  - Characterization of bubbler performance for low-volatility liquid precursor delivery
ER  -