TY  - JOUR
AU  - Attota, Ravikiran
AU  - Bunday, Benjamin
AU  - Vertanian, Victor
C2  - Applied Physics Letters
DA  - 2013-06-07
LA  - en
PB  - Applied Physics Letters
PY  - 2013
TI  - Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node
ER  -