TY - CONF AU - Okoro, Chukwudi AU - Obeng, Yaw AU - Obrzut, Jan AU - Kabos, Pavel AU - Hummler, Klaus C2 - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV DA - 2013-05-28 LA - en PB - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV PY - 2013 TI - Use of RF-Based Technique as a Metrology Tool for TSV Reliability Analysis ER -