TY  - CONF
AU  - Okoro, Chukwudi
AU  - Levine, Lyle
AU  - Kirillov, Oleg
AU  - Obeng, Yaw
AU  - Xu, Ruqing
AU  - Z., Jonathan
AU  - Liu, Wenjun
AU  - Klaus, 
C2  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV
DA  - 2013-05-28
LA  - en
PB  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV
PY  - 2013
TI  - X-Ray Micro-Beam Diffraction Determination of Full Stress Tensors in Cu TSVs
ER  -