TY  - JOUR
AU  - DelRio, Frank
AU  - Boyce, Brad
AU  - Benzing, Jake
AU  - Friedman, Lawrence
AU  - Cook, Robert
C2  - Journal of Micromechanics and Microengineering
DA  - 2020-11-06
DO  - https://doi.org/10.1088/1361-6439/abbf89
LA  - en
PB  - Journal of Micromechanics and Microengineering
PY  - 2020
TI  - Shoulder fillet effects in strength distributions of MEMS components
ER  -