TY  - CONF
AU  - Attota, Ravikiran
AU  - Park, Haesung
AU  - Vartanian, Victor
AU  - Orji, Ndubuisi
AU  - Allen, Richard
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2013-04-30
LA  - en
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2013
TI  - TSV Reveal height and bump dimension metrology by the TSOM method
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913667
ER  -