TY  - CONF
AU  - Attota, Ravikiran
AU  - Arceo, Abraham
AU  - Benjamin, Bunday
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2013-04-30
LA  - en
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2013
TI  - Use of TSOM for sub-11 nm node pattern defect detection and HAR features
ER  -