TY  - GEN
AU  - Cassard, Janet
AU  - Geist, Jon
AU  - Vorburger, Theodore
AU  - Read, David
AU  - Gaitan, Michael
AU  - Seiler, David
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2013-02-15
DO  - https://doi.org/10.6028/NIST.SP.260-177
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2013
TI  - User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
ER  -