TY  - CONF
AU  - Sohn, Martin
AU  - Barnes, Bryan
AU  - Silver, Richard
C2  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-25
LA  - en
PB  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Quantitative Characterization and Applications of A 193 nm Scatterfield Microscope
ER  -