TY  - CONF
AU  - Cassard, Janet
AU  - Geist, Jon
AU  - McGray, Craig
AU  - Allen, Richard
AU  - Afridi, Muhammad
AU  - Nablo, Brian
AU  - Gaitan, Michael
AU  - Seiler, David
C2  - A conference poster paper for publication on-line, Gaithersburg, MD
DA  - 2013-03-27
LA  - en
PB  - A conference poster paper for publication on-line, Gaithersburg, MD
PY  - 2013
TI  - The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912229
ER  -