TY  - CONF
AU  - Qin, Jing
AU  - Zhou, Hui
AU  - Barnes, Bryan
AU  - Dixson, Ronald
AU  - Silver, Richard
C2  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Gaithersburg, MD
DA  - 2013-03-25
LA  - en
PB  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics , Gaithersburg, MD
PY  - 2013
TI  - 3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization
ER  -