TY  - JOUR
AU  - Hacker, Christina
AU  - Diebold, Alain
C2  - Future Fab International
DA  - 2013-01-01
LA  - en
PB  - Future Fab International
PY  - 2013
TI  - 2012 Updates to the International Technology Roadmap for Semiconductors (ITRS) Metrology Chapter
ER  -