TY  - JOUR
AU  - Prabhu, Vivek
AU  - Kang, Shuhui
AU  - Soles, Christopher
AU  - Ober, Christopher
AU  - Sha, Jing
AU  - Lee, Jin-Kyun
AU  - Bonnesen, Peter
C2  - Chemistry of Materials
DA  - 2010-04-20
LA  - en
PB  - Chemistry of Materials
PY  - 2010
TI  - Architectural Effects on Reaction-Diffusion Kinetics in Molecular Glass Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904649
ER  -