TY  - JOUR
AU  - Prabhu, Vivek
AU  - Kang, Shuhui
AU  - Wu, Wen-Li
AU  - Satija, Sushil
AU  - Ober, Christopher
AU  - Sha, Jing
AU  - Bonnesen, Peter
C2  - Advanced Functional Materials
DA  - 2012-05-11
LA  - en
PB  - Advanced Functional Materials
PY  - 2012
TI  - Neutron reflectivity characterization of the photoacid reaction-diffusion latent and developed images of molecular resists for extreme-ultraviolet lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908575
ER  -