TY  - CONF
AU  - Qin, Jing
AU  - Zhou, Hui
AU  - Barnes, Bryan
AU  - Goasmat, Francois
AU  - Dixson, Ronald
AU  - Silver, Richard
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
DA  - 2012-10-11
DO  - https://doi.org/10.1117/12.946120
LA  - en
M1  - 8466
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
PY  - 2012
TI  - Multiple-order Imaging for Optical Critical Dimension Metrology using Microscope Characterization
ER  -