TY  - CONF
AU  - Vorburger, Theodore
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - Fu, Joseph
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Hackley, Vincent
C2  - 2nd International Conference on Surface Metrology, Worcester, MA
DA  - 2010-10-01
LA  - en
PB  - 2nd International Conference on Surface Metrology, Worcester, MA
PY  - 2010
TI  - Nano- and Atom-scale Length Metrology
ER  -