TY  - CONF
AU  - Renegar, Thomas
AU  - Soons, Johannes
AU  - Muralikrishnan, Balasubramanian
AU  - Villarrubia, John
AU  - Zheng, Xiaoyu
AU  - Vorburger, Theodore
AU  - Song, Jun-Feng
C2  - 3rd International Conference on Surface Metrology, Annecy, -1
DA  - 2012-03-21
LA  - en
PB  - 3rd International Conference on Surface Metrology, Annecy, -1
PY  - 2012
TI  - Stylus Tip-Size Effect on the Calibration of Periodic Roughness Specimens with Rectangular Profiles
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911079
ER  -