TY  - VIDEO
AU  - Postek, Michael
AU  - Vladar, Andras
AU  - Villarrubia, John
C2  - Hitachi News
DA  - 2009-09-01
LA  - en
PB  - Hitachi News
PY  - 2009
TI  - Nanometrology Solutions Using an Ultra-High Resolution In-lens SEM
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902308
ER  -