TY  - CONF
AU  - Sohn, Martin
AU  - Quintanilha, Richard
AU  - Barnes, Bryan
AU  - Silver, Richard
C2  - Proceedings SPIE Optics & Photonics, San Diego, CA
DA  - 2009-08-24
LA  - en
M1  - 7405
PB  - Proceedings SPIE Optics & Photonics, San Diego, CA
PY  - 2009
TI  - 193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology
ER  -