TY  - JOUR
AU  - McGray, Craig
AU  - Kasica, Richard
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Geist, Jon
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2012-05-29
LA  - en
M1  - 11
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2012
TI  - Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908076
ER  -