TY  - JOUR
AU  - Silver, Richard
AU  - Barnes, Bryan
AU  - Attota, Ravikiran
AU  - Jun, Jay
AU  - Stocker, Michael
AU  - Marx, Egon
AU  - Patrick, Heather
C2  - Applied Optics
DA  - 2007-06-20
LA  - en
M1  - 46
PB  - Applied Optics
PY  - 2007
TI  - Extending the Limits of Image-Based Optical Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823218
ER  -