TY  - JOUR
AU  - Maslar, James
AU  - Kimes, William
AU  - Sperling, Brent
C2  - Journal of Nanoscience and Nanotechnology
DA  - 2011-07-12
LA  - en
M1  - 11
PB  - Journal of Nanoscience and Nanotechnology
PY  - 2011
TI  - In Situ Gas Phase Measurements During Metal Alkylamide Atomic Layer Deposition
ER  -