TY  - JOUR
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - McGray, Craig
AU  - Bonevich, John
AU  - Geist, Jon
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2012-03-09
LA  - en
M1  - 11
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2012
TI  - Traceable Calibration of a Critical Dimension Atomic Force Microscope
ER  -