TY  - CONF
AU  - Attota, Ravikiran
AU  - Dixson, Ronald
AU  - Kramar, John
AU  - Potzick, James
AU  - Vladar, Andras
AU  - Bunday, Benjamin
AU  - Novak, Erik
AU  - Rudack, Andrew
C2  - SPIE Advanced Lithography, San Jose, CA
DA  - 2011-04-18
LA  - en
M1  - 7971
PB  - SPIE Advanced Lithography, San Jose, CA
PY  - 2011
TI  - TSOM Method for Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908177
ER  -