TY  - CONF
AU  - Attota, Ravikiran
AU  - Arceo, Abraham
AU  - Bunday, Benjamin
AU  - Vertanian, Victor
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2012-04-10
LA  - en
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2012
TI  - Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node
ER  -