TY  - CONF
AU  - Attota, Ravikiran
AU  - Stocker, Michael
AU  - Silver, Richard
AU  - Heckert, Nathanael
AU  - Zhou, Hui
AU  - Kasica, Richard
AU  - Chen, Lei
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - Barnes, Bryan
AU  - Lipscomb, Peter
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXIII, John A. Allgair, Editor, San Jose, CA
DA  - 2008-09-01
LA  - en
M1  - 33
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXIII, John A. Allgair, Editor, San Jose, CA
PY  - 2008
TI  - Through-focus Scanning and Scatterfield Optical Methods for Advanced Overlay Target Analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902294
ER  -