TY  - CONF
AU  - Gallatin, Gregg
AU  - Naulleau, Patrick
AU  - Brainard, Robert
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2012-03-23
LA  - en
M1  - 8322
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2012
TI  - Modeling the effects of acid amplifiers on photoresist stochastics
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910777
ER  -