TY  - CONF
AU  - Silver, Richard
AU  - Qin, Jing
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Dixson, Ronald
AU  - Goasmat, Francois
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2012-04-04
LA  - en
M1  - 8324
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2012
TI  - Phase sensitive parametric optical metrology: Exploring the limits of 3-dimensional optical metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911039
ER  -