TY  - JOUR
AU  - Moffat, Thomas
AU  - Wheeler, Daniel
AU  - Huber, W
AU  - Josell, Daniel
C2  - Journal of the Electrochemical Society
DA  - 2000-12-01
LA  - en
M1  - 147
PB  - Journal of the Electrochemical Society
PY  - 2000
TI  - Superconformal Electrodeposition of Copper in 500-90 nm Features
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852990
ER  -