TY  - CONF
AU  - Mulholland, George
AU  - Bryner, Nelson
AU  - Liggett, Walter
AU  - Scheer, B
AU  - Goodall, R.
C2  - International Society for Optical Engineering (SPIE), Denver, CO
DA  - 1996-08-08
LA  - en
M1  - 2862
PB  - International Society for Optical Engineering (SPIE), Denver, CO
PY  - 1996
TI  - Selection of Calibration Particles for Scanning Surface Inspection Systems
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910979
ER  -