TY  - JOUR
AU  - Quintanilha, Richard
AU  - Barnes, Bryan
AU  - Sohn, Martin
AU  - Howard, Lowell
AU  - Silver, Richard
AU  - Potzick, James
AU  - Stocker, Michael
C2  - SPIE proceedings series
DA  - 2009-09-30
LA  - en
M1  - 7488
PB  - SPIE proceedings series
PY  - 2009
TI  - Photomask metrology using a 193 nm scatterfield microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903929
ER  -