TY  - CONF
AU  - Silver, Richard
AU  - Barnes, Bryan
AU  - Sohn, Martin
AU  - Quintanilha, Richard
AU  - Zhou, Hui
AU  - Deeb, Chris
AU  - Johnson, Mark
AU  - Goodwin, Milton
AU  - Patel, Dilip
C2  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
DA  - 2010-04-01
LA  - en
M1  - 7638
PB  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
PY  - 2010
TI  - The Limits and Extensibility of Optical Patterned Defect Inspection
ER  -