TY  - CONF
AU  - Barnes, Bryan
AU  - Quintanilha, Richard
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Silver, Richard
C2  - SPIE Advanced Lithography, Gaithersburg, MD
DA  - 2011-04-20
LA  - en
M1  - 7971
PB  - SPIE Advanced Lithography, Gaithersburg, MD
PY  - 2011
TI  - Optical illumination optimization for patterned defect inspection
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908276
ER  -