TY  - JOUR
AU  - Barnes, Bryan
AU  - Attota, Ravikiran
AU  - Quintanilha, Richard
AU  - Sohn, Martin
AU  - Silver, Richard
C2  - Measurement Science & Technology
DA  - 2010-12-21
LA  - en
M1  - 22
PB  - Measurement Science & Technology
PY  - 2010
TI  - Characterizing a Scatterfield Optical Platform for Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905931
ER  -