TY  - CONF
AU  - Silver, Richard
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Zhang, Nien
AU  - Dixson, Ronald
C2  - SPIE Proc. Optical Metrology
, Munich, -1
DA  - 2009-08-15
LA  - en
M1  - 7390
PB  - SPIE Proc. Optical Metrology
, Munich, -1
PY  - 2009
TI  - Angle-resolved Optical Metrology using Multi-Technique Nested Uncertainties
ER  -