TY  - CONF
AU  - Silver, Richard
AU  - Zhang, Nien
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Qin, Jing
AU  - Dixson, Ronald
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2011-04-18
LA  - en
M1  - 7971
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2011
TI  - Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy
ER  -