TY  - JOUR
AU  - Attota, Ravikiran
AU  - Silver, Richard
AU  - Germer, Thomas
C2  - Future Fab International
DA  - 2009-07-15
LA  - en
PB  - Future Fab International
PY  - 2009
TI  - Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902707
ER  -