TY  - JOUR
AU  - Tarrio, Charles
AU  - Grantham, Steven
AU  - Hill, Shannon
AU  - Faradzhev, Nadir
AU  - Richter, Lee
AU  - Knurek, Chester
AU  - Lucatorto, Thomas
C2  - Review of Scientific Instruments
DA  - 2011-09-30
LA  - en
M1  - 82
PB  - Review of Scientific Instruments
PY  - 2011
TI  - A synchrotron beamline for extreme-ultraviolet photoresist testing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908231
ER  -