TY  - JOUR
AU  - Dixson, Ronald
AU  - Chernoff, Donald
AU  - Wang, Shihua
AU  - Vorburger, Theodore
AU  - Tan, Siew-Leng
AU  - Orji, Ndubuisi
AU  - Fu, Joseph
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2011-03-08
LA  - en
M1  -  10
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2011
TI  - Multi-laboratory Comparison of Traceable Atomic Force Microscope Measurements of 70 nm Grating Pitch
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906777
ER  -