TY  - JOUR
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Cordes, Aaron
AU  - Bunday, Benjamin
AU  - Allgair, John
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2011-03-08
LA  - en
M1  - 10
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2011
TI  - Measurement Traceability and Quality Assurance in a Nanomanufacturing Environment
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906853
ER  -